Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10802404 | Reticle and exposure method including projection of a reticle pattern into neighboring exposure fields | Joerg Ortner, Ingo Muri | 2020-10-13 |
| 10714377 | Semiconductor device and semiconductor wafer including a porous layer and method of manufacturing | Ingo Muri, Bernhard Goller, Hans-Joachim Schulze | 2020-07-14 |
| 10535553 | Devices with backside metal structures and methods of formation thereof | Oliver Hellmund, Ingo Muri, Johannes Baumgartl, Thomas Neidhart, Hans-Joachim Schulze | 2020-01-14 |