Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877263 | Mirror device having leaf spring with openings | Kaveh Samadi Khah | 2020-12-29 |
| 10788659 | Monitoring of MEMS mirror properties | Alexander Hulsker, Jaap VERHEGGEN | 2020-09-29 |
| 10768410 | Detection of amplitude, regulation of amplitude and detection of direction of an oscillation of an oscillatory body | Christoph Steiner, Stephan Gerhard Albert, Franz Michael Darrer, Marcus Hennecke, Thomas Thurner | 2020-09-08 |