Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825682 | Method for producing a pillar structure in a semiconductor layer | Boon Teik Chan, Vasile Paraschiv, Zheng Tao | 2020-11-03 |
| 10782607 | Reticles for lithography | Boon Teik Chan, Kim Vu Luong, Vicky Philipsen, Kevin Vandersmissen | 2020-09-22 |
| 10784158 | Area-selective deposition of a tantalum silicide TaSix mask material | Boon Teik Chan | 2020-09-22 |