Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784070 | Charged particle beam device, field curvature corrector, and methods of operating a charged particle beam device | Thomas Kemen, Roman Barday | 2020-09-22 |
| 10748743 | Device and method for operating a charged particle device with multiple beamlets | Dieter Winkler, Ralf Schmid | 2020-08-18 |
| 10593509 | Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device | Dieter Winkler | 2020-03-17 |