Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651286 | High selectivity nitride removal process based on selective polymer deposition | Sebastian U. Engelmann, Nicholas C. M. Fuller, Masahiro Nakamura, Richard S. Wise | 2020-05-12 |