Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859175 | Flow control valve apparatus | Hideki Tanaka, Akihiro Kondo | 2020-12-08 |
| 10804110 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transistory computer-readable recording medium | Noriaki MICHITA | 2020-10-13 |
| 10595412 | Semiconductor device, electronic device, method of manufacturing semiconductor device, and method of manufacturing electronic device | Tsuyoshi Kanki | 2020-03-17 |