Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825654 | Ion implantation apparatus and measurement device | Hiroyuki Kariya, Masahide Ooura | 2020-11-03 |
| 10672586 | Ion implantation apparatus and ion implantation method | Sho Kawatsu | 2020-06-02 |