Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10535543 | Teaching jig, substrate processing apparatus, and teaching method | Akihito Watanabe, Ryo Yamaguchi, Katsumi Takashima | 2020-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10535543 | Teaching jig, substrate processing apparatus, and teaching method | Akihito Watanabe, Ryo Yamaguchi, Katsumi Takashima | 2020-01-14 |