Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10643326 | Semiconductor measurement apparatus and computer program | Ryoichi Matsuoka | 2020-05-05 |
| 10558127 | Exposure condition evaluation device | Shinichi Shinoda, Hiroyuki Ushiba, Hitoshi Sugahara | 2020-02-11 |