Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10641607 | Height detection apparatus and charged particle beam apparatus | Yoshifumi Sekiguchi, Koichi Taniguchi, Makoto Suzuki | 2020-05-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10641607 | Height detection apparatus and charged particle beam apparatus | Yoshifumi Sekiguchi, Koichi Taniguchi, Makoto Suzuki | 2020-05-05 |