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Motohiro Tanaka

HHHitachi High-Technologies: 1 patents #98 of 336Top 30%
Overall (2020): #337,598 of 565,922Top 60%
1 Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10699909 Plasma processing apparatus and plasma processing method Yasushi Sonoda 2020-06-30

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