Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10775325 | Method and system for inspecting an EUV mask | Guochong Weng, Chiyan Kuan, Chung-Shih Pan | 2020-09-15 |
| 10643818 | Load lock system for charged particle beam imaging | Hsuan-Bin Huang, Chun Lu, Chin-Fa Tu, Wen-Sheng Lin | 2020-05-05 |