Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844490 | Vapor phase film deposition apparatus | Noboru Suda, Junji Komeno, Takahiro Oishi, Tsan-Hua Huang | 2020-11-24 |
| 10801110 | Gas injector for semiconductor processes and film deposition apparatus | — | 2020-10-13 |