Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732519 | Mirror blank for EUV lithography without expansion under EUV radiation | Klaus Becker | 2020-08-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732519 | Mirror blank for EUV lithography without expansion under EUV radiation | Klaus Becker | 2020-08-04 |