Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10876647 | Quick release purge valve and substrate container using same | Ming-Chien Chiu, Hsin-Min Hsueh | 2020-12-29 |
| 10670976 | EUV reticle pod | Hsin-Min Hsueh, Cheng-Ju Lee, Jeng-Jie Huang | 2020-06-02 |
| 10607871 | Reticle pressing unit and EUV reticle pod using same | Ming-Chien Chiu, Hsin-Min Hsueh | 2020-03-31 |