Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10667375 | Extreme ultraviolet light generation method | — | 2020-05-26 |
| 10627287 | Thomson scattering measurement system and EUV light generation system | Kouichiro Kouge | 2020-04-21 |
| 10630042 | System and method for generating extreme ultraviolet light, and laser apparatus | Osamu Wakabayashi | 2020-04-21 |
| 10582601 | Extreme ultraviolet light generating apparatus using differing laser beam diameters | — | 2020-03-03 |
| 10555408 | Extreme ultraviolet light generation system | Osamu Wakabayashi | 2020-02-04 |