TI

Takanobu Ishihara

GI Gigaphoton: 1 patents #20 of 50Top 40%
Overall (2020): #255,731 of 565,922Top 50%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10548209 Chamber apparatus, target generation method, and EUV light generation apparatus — 2020-01-28