Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10830367 | Fluid control system | Kenji Aikawa, Hajime Nakagawa, Takahiro Matsuda, Akihiro Harada | 2020-11-10 |
| 10737345 | Pipe joint, fluid control device, fluid control unit, semiconductor fabrication apparatus and method of forming pipe joint | Kazunari Watanabe, Toshiyuki Inada, Tomohiro Nakata | 2020-08-11 |