Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727060 | Doping system, doping method and method for manufacturing silicon carbide semiconductor device | Kenichi Iguchi | 2020-07-28 |
| 10658183 | Impurity adding apparatus, impurity adding method, and semiconductor element manufacturing method | Kenichi Iguchi, Masaaki Ogino | 2020-05-19 |
| 10559664 | Method of manufacturing semiconductor device by removing a bulk layer to expose an epitaxial-growth layer and by removing portions of a supporting-substrate to expose portions of the epitaxial-growth layer | Kenichi Iguchi | 2020-02-11 |