Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10807859 | MEMS actuator, system having a plurality of MEMS actuators, and method for producing a MEMS actuator | Peter Duerr, Detlef Kunze, Andreas Neudert | 2020-10-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10807859 | MEMS actuator, system having a plurality of MEMS actuators, and method for producing a MEMS actuator | Peter Duerr, Detlef Kunze, Andreas Neudert | 2020-10-20 |