Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692707 | RF substrate bias with high power impulse magnetron sputtering (HIPIMS) | Stanislav Kadlec | 2020-06-23 |
| 10580671 | Chamber for degassing substrates | — | 2020-03-03 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692707 | RF substrate bias with high power impulse magnetron sputtering (HIPIMS) | Stanislav Kadlec | 2020-06-23 |
| 10580671 | Chamber for degassing substrates | — | 2020-03-03 |