Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852528 | Method and device for exposure of photosensitive layer | Bernhard Thallner | 2020-12-01 |
| 10656078 | Metrology device and metrology method | Martin Eibelhuber, Markus Heilig | 2020-05-19 |