Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553406 | Plasma generating apparatus and substrate processing apparatus | Hong-Young Chang, Sang-Hun Seo | 2020-02-04 |
| 10541114 | Inductive coil structure and inductively coupled plasma generation system | Sae-Hoon Uhm | 2020-01-21 |