Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665495 | Substrate attachment/detachment device, plating device, control device for a substrate attachment/detachment device, and storage medium that stores a program for causing a computer to execute a method of controlling a substrate attachment/detachment device | Yoshitaka Mukaiyama, Takuya Tsushima | 2020-05-26 |
| 10654017 | Supply-liquid producing apparatus and supply-liquid producing method | Suguru OZAWA, Yoichi Nakagawa, Muneto Takahashi, Tao Xu | 2020-05-19 |