Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816323 | Film-thickness measuring apparatus, polishing apparatus, and polishing method | — | 2020-10-27 |
| 10663287 | Polishing apparatus | Nobuyuki Takahashi, Masaki Kinoshita | 2020-05-26 |