Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10780524 | Laser processing method and laser processing apparatus | Noboru Takeda | 2020-09-22 |
| 10727127 | Method of processing a substrate | Karl Heinz Priewasser, Nao Hattori | 2020-07-28 |
| 10702946 | Substrate processing method | Karl Heinz Priewasser, Nao Hattori | 2020-07-07 |
| 10628933 | Inspecting apparatus and laser processing apparatus | Noboru Takeda | 2020-04-21 |
| 10610974 | Laser processing apparatus and laser processing method | Tomoki Yoshino | 2020-04-07 |
| 10553490 | Processing method for wafer | Noboru Takeda | 2020-02-04 |