Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748744 | Method and system for determining a charged particle beam exposure for a local pattern density | Akira Fujimura, Harold Robert Zable, Nagesh Shirali, William E. Guthrie | 2020-08-18 |