Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852227 | Apparatus for and method of sensing fluorine concentration | — | 2020-12-01 |
| 10845711 | Lithography optics adjustment and monitoring | Thomas F. A. Bibby, Omar Zurita, Abhishek Subramanian | 2020-11-24 |