Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871369 | Systems for and methods of measuring photomask flatness with reduced gravity-induced error | Thomas J. Dunn, Robert Dennis Grejda, Christopher Lee, Matthew Ronald Millecchia, Yoshihiro Nakamura | 2020-12-22 |