Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10546768 | Apparatus and method to electrostatically chuck substrates to a moving carrier | Daniel Robert Boughton, Valerie Elise Mebert | 2020-01-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10546768 | Apparatus and method to electrostatically chuck substrates to a moving carrier | Daniel Robert Boughton, Valerie Elise Mebert | 2020-01-28 |