AF

Aurélien Fay

CEA: 1 patents #214 of 820Top 30%
Overall (2020): #539,326 of 565,922Top 100%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10573492 Calibration of elementary small patterns in variable-shaped-beam electron-beam lithography Jacky Chartoire 2020-02-25