Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10562149 | Polyurethane CMP pads having a high modulus ratio | Lin Fu, Rui Ma, Nathan Speer, Kathryn Bergman | 2020-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10562149 | Polyurethane CMP pads having a high modulus ratio | Lin Fu, Rui Ma, Nathan Speer, Kathryn Bergman | 2020-02-18 |