Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10647570 | Fabrication process for a symmetrical MEMS accelerometer | Lianzhong Yu, Chen Sun | 2020-05-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10647570 | Fabrication process for a symmetrical MEMS accelerometer | Lianzhong Yu, Chen Sun | 2020-05-12 |