Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734189 | Ion implantation amount adjustment device and method, ion implantation apparatus and determination method | Hao Jing, Dongwoo Kang, Yongyi Fu, Chenliang Liu, Kang Luo | 2020-08-04 |
| 10598220 | Bearing device and ion implantation device | Chenliang Liu, Donghua JIANG, Yongyi Fu, Chao Tan, Xuewei Wang +5 more | 2020-03-24 |