Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10868122 | Silicon carbide semiconductor device and a method of manufacturing the silicon carbide semiconductor device | Takeshi Tawara, Koji Nakayama, Yoshiyuki Yonezawa, Koichi Murata | 2020-12-15 |
| 10748763 | Silicon carbide semiconductor substrate, method of manufacturing a silicon carbide semiconductor device, and silicon carbide semiconductor device | Takeshi Tawara, Tetsuya Miyazawa | 2020-08-18 |
| 10665681 | Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device | Takeshi Tawara, Koichi Murata | 2020-05-26 |
| 10584417 | Film forming apparatus, susceptor, and film forming method | Hideki Ito, Isaho Kamata, Masahiko Ito, Masami Naito, Hiroaki Fujibayashi +2 more | 2020-03-10 |