Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866528 | Component for a projection exposure apparatus | Stefan Krone, Volker Wieczorek, Lars Berger | 2020-12-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866528 | Component for a projection exposure apparatus | Stefan Krone, Volker Wieczorek, Lars Berger | 2020-12-15 |