Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10649343 | Method and device for modifying imaging properties of an optical system for microlithography | Jochen Knopf | 2020-05-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10649343 | Method and device for modifying imaging properties of an optical system for microlithography | Jochen Knopf | 2020-05-12 |