Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871717 | Optical system for a projection exposure apparatus | — | 2020-12-22 |
| 10802403 | Method for the microlithographic production of microstructured components | — | 2020-10-13 |
| 10678144 | Projection exposure method and projection exposure apparatus for microlithography | — | 2020-06-09 |