Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10578972 | EUV collector for use in an EUV projection exposure apparatus | Holger Kierey | 2020-03-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10578972 | EUV collector for use in an EUV projection exposure apparatus | Holger Kierey | 2020-03-03 |