Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10663873 | Mirror arrangement for microlithographic projection exposure apparatus and related method | Willi Heintel | 2020-05-26 |
| 10606179 | Projection exposure apparatus for semiconductor lithography with reduce thermal deformation | — | 2020-03-31 |