Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854421 | Charged particle beam system and method | Daniela Donhauser, Christian Mueller, Barry Chamley, Tobias Volkenandt, Dirk Preikszas +1 more | 2020-12-01 |
| 10763076 | Method for operating a particle beam generator for a particle beam device and particle beam device comprising a particle beam generator | — | 2020-09-01 |