Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685815 | Plasma processing apparatus and device manufacturing method | Ryo Matsuhashi, Hiroshi Akasaka, Atsushi Sekiguchi, Naoko Matsui | 2020-06-16 |
| 10546720 | Ion beam processing device | Isao Takeuchi, Mihoko Nakamura | 2020-01-28 |