Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10850363 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus | Yukiteru Matsui, Takahiko Kawasaki, Akifumi GAWASE, Shuji Suzuki | 2020-12-01 |
| 10553507 | Control device and control method of semiconductor manufacturing apparatus | Syunichi Ono, Kenichi Otsuka | 2020-02-04 |