Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10636634 | Sputtering apparatus, film deposition method, and control device | Koji Tsunekawa, Masahiro Suenaga | 2020-04-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10636634 | Sputtering apparatus, film deposition method, and control device | Koji Tsunekawa, Masahiro Suenaga | 2020-04-28 |