Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10578846 | Projection optical system, exposure apparatus, and article manufacturing method | Michio Kono, Kiyoshi Fukami | 2020-03-03 |
RF
Ryosuke Fukuoka
Overall (2020): #291,248 of 565,922Top 55%
1
Patents 2020