Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10663858 | Imprint apparatus that forms a pattern of an imprint material on a substrate-side pattern region of a substrate using a mold, and related methods | Tatusya Hayashi, Yosuke Murakami, Hirotoshi Torii, Yusuke Tanaka | 2020-05-26 |