Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10672673 | Method of performing analysis of pattern defect, imprint apparatus, and article manufacturing method | Norikazu Baba | 2020-06-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10672673 | Method of performing analysis of pattern defect, imprint apparatus, and article manufacturing method | Norikazu Baba | 2020-06-02 |