Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10739686 | Beam transmission system, exposure device, and illumination optical system of the exposure device | Osamu Wakabayashi | 2020-08-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10739686 | Beam transmission system, exposure device, and illumination optical system of the exposure device | Osamu Wakabayashi | 2020-08-11 |