Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10829868 | Manufacturing method of SiC composite substrate | Shoji Akiyama, Yoshihiro Kubota | 2020-11-10 |
| 10711373 | SiC composite substrate and method for manufacturing same | Yoshihiro Kubota, Shoji Akiyama | 2020-07-14 |
| 10612157 | Method for manufacturing SiC composite substrate, and method for manufacturing semiconductor substrate | Yoshihiro Kubota, Shoji Akiyama | 2020-04-07 |