Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10640862 | Method for forming film and method for forming aluminum nitride film | Jun Wang, Boyu DONG, Bingliang GUO, Huaichao MA | 2020-05-05 |
| 10643843 | Film forming method and aluminum nitride film forming method for semiconductor apparatus | Jun Wang, Boyu DONG, Bingliang GUO, Huaichao MA | 2020-05-05 |